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RecordNumber
35091
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Author
Pelliccione, Matthew.
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Title
Evolution of thin film morphology :modeling and simulations
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Author Statement
Matthew Pelliccione and Toh-Ming Lu
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Publication
Springer
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Collation
xi, 204 p. : ill. ; 24 cm.
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Series
Springer series in materials science ;v. 108
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Notes
Includes bibliographical references (p. [191]-200) and index
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Subject
Thin film devices,Thin films,Thin films,Chemical vapor deposition
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ADDED ENTRIES
AU Lu, T.-M.(Toh-Ming) 1943- , TI , SE
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LC Class
TK
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LC Number
7872.T55
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LC CutterNumber
P45
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LC Date
2008
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LC NO
TK 7872.T55 P45 2008
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Published_Year
2008
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Link To Document :
