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RecordNumber
33696
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Author
Baglio, S. (Salvatore)
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Title
Scaling issues and design of MEMS
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Author Statement
Salvatore Baglio, Salvatore Castorina, NicolDo Savalli
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Publication
John Wiley & Sons
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Collation
xiii, 229 p. : ill. ; 24 cm.
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Notes
Includes bibliographical references and index
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Subject
Microelectromechanical systems
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ADDED ENTRIES
AU Castorina, Salvatore , AU Savalli, Nicol , TI
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LC Class
TK
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LC Number
7875
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LC CutterNumber
.B34
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LC Date
2007
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LC NO
TK 7875 .B34 2007
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Published_Year
c2007
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Link To Document :
